OBSOLETE
TYPE AND MODEL |
NOTES |
CURRENT MODEL
COMBINATIONS |
UP-GRADE KIT |
CONTROL |
DISPLAY |
PROGRAMMER |
AMPLIFIER |
24CJ5-3000 |
1, 2, 3, 4 |
N/A |
E110 |
ED510 |
EP380 |
ERT1 |
24CJ5-3010 |
1, 2, 3, 4 |
N/A |
24CJ5-3011 |
1, 2, 3, 4 |
N/A |
24CJ5-5010 |
2, 3, 4, 26 |
N/A |
25CJ5-5011 |
2, 3, 4, 26 |
N/A |
E110 |
ED510 |
EP390 |
ERT1 |
24CJ5-5015 |
2, 4, |
N/A |
E110 |
ED510 |
EP380 |
ERT1 |
24RJ8-1000 |
1, 2, 4 |
N/A |
25CU6-1050 |
1, 2, 3, 4 |
N/A |
E110 |
ED510 |
EP380 |
EUV1 |
25CU6-1062 |
1, 2, 3, 4, 26 |
N/A |
25CU6-5062 |
2, 3, 4, 26 |
N/A |
25CU6-1063 |
1, 2, 3, 4, 26 |
N/A |
E110 |
ED510 |
EP390 |
EUV1 |
25CU6-5063 |
2, 3, 4, 26 |
N/A |
25CU6-5065 |
2, 4, |
N/A |
E110 |
ED510 |
EP160 |
EUV1 |
25CU6-5066 |
2, 4, |
N/A |
E110 |
ED510 |
EP260 |
EUV1 |
25CU6-RS-2 |
1, 2, 3, 4 |
N/A |
E110 |
ED510 |
EP380 |
EUV1 |
25CU6-RS-2D |
1, 2, 3, 4 |
N/A |
25CU6-RS-2RE |
2, 3, 4, |
N/A |
E110 |
ED510 |
EP390 |
EUV1 |
25DU4-1040 |
1, 2, 6 |
N/A |
70D40 |
-- |
-- |
72DUV1 |
25DU4-5040 |
2, 6 |
N/A |
25DU4-5060 |
2 |
N/A |
25RU8-4580 |
27 |
N/A |
E110 |
ED510 |
EP160 |
EUVS4 |
25RU8-6558 |
7 |
PFM2-UV |
E110 |
ED510 |
EP260 |
EUVS4 |
25RU8-6560 |
7 |
25RU8-6566 |
1, 4, 7, 8 |
N/A |
E110 |
ED510 |
EP260 |
EUV1 |
25RU8-6570 |
7 |
PFM3-UV |
E110 |
ED510 |
EP160 |
EUV1 |
25RU8-6580 |
1, 4, 7, 9 |
N/A |
E110 |
ED510 |
EP260 |
EUV1 |
25SU5-1000 |
10, 11, 12 |
N/A |
25SU5-5011
or
25SU5-5012 |
60-2205
(Optional) |
-- |
INC. |
25SU5-1011 |
10, 11, 12 |
N/A |
25SU5-4011 |
11, 12 |
N/A |
25SU5-4111 |
11, 12 |
N/A |
25SU5-4013 |
13 |
N/A |
70D40 |
-- |
-- |
72UVS4 |
25SU5-4018 |
13 |
N/A |
26DF4-5030 |
2 |
N/A |
70D40 |
-- |
-- |
72D1R1 |
26CF6-1000 |
1, 2, 3, 4 |
N/A |
E110 |
ED510 |
EP380 |
E1R1 |
26CF6-1010 |
1, 2, 3, 4 |
N/A |
26CF6-5020 |
2, 3, 4, 26 |
N/A |
26CF6-1011 |
1, 2, 3, 4 |
N/A |
E110 |
ED510 |
EP390 |
E1R1 |
26CF6-5021 |
2, 3, 4, 26 |
N/A |
26CF6-5022 |
2, 4 |
N/A |
E110 |
ED510 |
EP160 |
E1R1 |
26CF6-5022(A) |
2, 4 |
N/A |
26CF6-5023 |
2, 4 |
N/A |
E110 |
ED510 |
EP260 |
E1R1 |
26CF6-RC-3A |
1, 2, 3, 4 |
N/A |
26RJ8-CB-1 |
14 |
PFM-9 |
E110 |
ED510 |
EP260 |
E1R1 |
26RJ8-CB-3 |
14 |
PFM-10 |
E110 |
ED510 |
EP160 |
E1R1 |
26RJ8-1000 |
14, 15, 16 |
PFM-1 |
E110 |
ED510 |
EP260 |
E1R1 |
26RJ8-1001 |
14, 15, 16 |
PFM-1 |
26RJ8-1002 |
14, 15, 16 |
PFM-1 |
26RJ8-1003 |
14, 15, 16 |
PFM-1 |
26RJ8-1004 |
14, 15, 16 |
PFM-1 |
26RJ8-1006 |
14, 15, 16 |
PFM-1 |
26RJ8-1008 |
14, 15, 16 |
PFM-1 |
26RJ8-1011 |
14, 15, 16 |
PFM-1 |
26RJ8-1012 |
14, 15, 16, 17 |
PFM-1 |
26RJ8-1016 |
14, 15, 16, 17 |
PFM-1 |
26RJ8-1018 |
14, 15, 16, 17 |
PFM-1 |
26RJ8-6008 |
14, 15, 16, 17 |
PFM-1 |
26RJ8-6012 |
14, 15, 16, 17 |
PFM-1 |
26RJ8-6016 |
14, 15, 16, 17 |
PFM-1 |
26RJ8-6018 |
14, 15, 16 |
PFM-1 |
26RJ8-1005 |
15, 18 |
N/A |
E110 |
ED510 |
EP160 |
E1R1 |
26RJ8-1009 |
15, 18, 19 |
N/A |
26RJ8-6009 |
15, 18, 19 |
N/A |
26RJ8-1114 |
CONSULT FACTORY |
|
|
|
|
26RJ8-1115 |
CONSULT FACTORY |
|
|
|
|
26RJ8-5914 |
CONSULT FACTORY |
|
|
|
|
26RJ8-6026 |
7, 18, 22 |
N/A |
E110 |
ED510 |
EP260 |
E1R1 |
26RJ8-6058 |
14 |
PFM-2 |
E110 |
ED510 |
EP260 |
E1R1 |
26RJ8-6060 |
26RJ8-6066 |
26RJ8-6068 |
26RJ8-6010D |
26RJ8-6070 |
14 |
PFM-3 |
E110 |
ED510 |
EP160 |
E1R1 |
26RJ8-6080D |
14 |
PFM-10 |
E110 |
ED510 |
EP160 |
E1R1 |
26SJ5-1000 |
14,
15, 20 |
PD4 |
70D40 |
-- |
-- |
72D1R1 |
26SJ5-1102 |
26SJ5-5900T |
26SJ5-5901T |
26SJ5-5903 |
26SJ5-6000 |
26SJ5-6002 |
26SJ5-1150 |
14,
15, 20, 21 |
N/A |
70D40 |
-- |
-- |
72D1R1 or
72DRT1 |
26SJ5-1152 |
26SJ5-6052 |
26SJ5-6152 |
26SJ5-5910 |
CONSULT FACTORY |
|
|
|
|
29RF5-1000 |
14,
15 |
PFM-1 |
E110 |
ED510 |
EP260 |
E1R1 |
29RF5-1001 |
29RF5-1002 |
29RF5-1005 |
29RF5-1009 |
29RF5-1015 |
29RF5-1103 |
29RF5-6009 |
29RF5-6015 |
29RF5-6103 |
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